교육

세미나

High-aspect-ratio silicon pillar arrays micro-column integrated micro gas chromatography for detecting VVOC mixtures

날짜
2024-09-25 16:00:00
학과
기계공학과
장소
110-N105
연사
Prof. Jung Hwan Seo

Gas chromatography (GC) is a reliable technique for analyzing complex gas mixtures, and the growing demand for sensitive, accurate, and portable tools has driven the development of micro gas chromatography (μGC).

These compact systems, enabled by advances in microfabrication, materials science, and detector technology, are widely applied in fields such as environmental monitoring, food analysis, and forensics.

A key component in μ-GC is the micro separation column, which plays a crucial role in the mixture separation process and significantly impacts system performance.

This study presents an innovative approach by introducing highaspect-ratio (HAR) micropillar arrays, known as black silicon, to enhance separation efficiency.

Using black silicon-based micro rods created during the Deep Reactive Ion Etching (Deep RIE) process, the HAR μpillar column provides a larger interactive surface area, leading to stronger analyte-stationary phase interactions.

This design improves resolution by at least 51% and enhances peak identification compared to traditional rectangular columns.